The HA series are high-accuracy digital PID controllers with a high speed sampling time of 25ms (0.025sec) with high-resolution input and output. Two-loop control, cascade control, and position proportional (valve) control are available in 1/8 DIN (HA400/401) or 1/4 DIN (HA900/901) package.
Not only high speed sampling time, but high input and output resolutions make the HA series suitable for applications in which accuracy is the most important. Control parameters are settable in 1/100 unit for accurate control.
HA400/900 is suitable for RTP (Rapid Thermal Process), RTA (Rapid Thermal Anneal), pressure control and mass flow control.